Claims
| Claim | Type | Assessment | Score | Review checks | References |
|---|---|---|---|---|---|
| A CMOS-compatible photolithography process produced 4-inch-wafer-scale monolayer MoS2 transistors with physical channels below 5 nm, an 88 mV/dec subthreshold swing, and an on/off ratio above 10^6. | QUANTITATIVE | Supported | 0.9561 | 1 of 4 | 109 |