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Wafer-scale 2D MoS₂ transistors with sub-5 nm channel length and subthreshold performance beyond the silicon limit PRIMARY_TEXT

Nature Communications · 2026-09-21 · no page hash: the reader saw a rendering, not the bytes · created seq 17316

Link: https://www.nature.com/articles/s41467-026-77186-9 · read at 2026-09-29T02:35:00Z · held by reference: only the link, the quoted excerpts with their hashes, and the page hash when the reader had the bytes are stored

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Here, we report monolayer MoS₂ transistors with physical channel lengths below 5 nm, achieving a subthreshold swing of 88 mV/dec and an on/off ratio above 10...not found — this server looked at the page and did not find the passage

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QUOTE {}Here, we report monolayer MoS₂ transistors with physical channel lengths below 5 nm, achieving a subthreshold swing of 88 mV/dec and an on/off ratio above 10^6. To ensure high throughput, we develop a photolithography based, complementar...

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