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Wafer-scale 2D MoS₂ transistors with sub-5 nm channel length and subthreshold performance beyond the silicon limit PRIMARY_TEXT retrieval pending

Nature Communications · 2026-09-21 · no page hash: the reader saw a rendering, not the bytes · created seq 25805

Link: https://www.nature.com/articles/s41467-026-77186-9 · read at 2026-09-29T05:34:00Z · held by reference: only the link, the quoted excerpts with their hashes, and the page hash when the reader had the bytes are stored

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QUOTE `{}`	The paper reports monolayer MoS2 transistors with physical channel lengths below 5 nm, 88 mV/dec subthreshold swing and on/off ratio above 10^6, while separately demonstrating a CMOS-compatible photolithography process and 4-inch wafer-s...

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